Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Compressed Air Element E-12-A product photo

Compressed Air Element E-12-A

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O-Ring VITON 70°Shore A D 24,77 x5,33 product photo

O-Ring VITON 70°Shore A D 24,77 x5,33

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F1124494 product photo

BRKT MTG 8300 11.07X3.57X.70

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F1300015 product photo

HZ9650SKYGE SEAL KIT

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PAD DEMISTING HLP6

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Additional membrane holder diam 47+grid

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RENTAL OF MISC. EQUIPMENT

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MOTOR,AMIAD,1/4 HP,208v/3ph,SAF4500 product photo

MOTOR,AMIAD,1/4 HP,208v/3ph,SAF4500

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PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN product photo

PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN

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PRESS TRANS,FOXBORO,0-30PSI,0.5IN product photo

PRESS TRANS,FOXBORO,0-30PSI,0.5IN

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OBSOLETE - Use WH079788

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PUMP,DIAPH,0-5 GPM,WILDEN,P.025,PP product photo

PUMP,DIAPH,0-5 GPM,WILDEN,P.025,PP

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63 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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