Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Sheet Depth Filter Modules

SUPRApak PW 7700 MW

Product ID: 5303104/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
11.2 in
Diameter (Metric)
285 mm
Filter Media
Cellulose
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRAdisc SD II 50 200X050C440SP product photo

SUPRAdisc SD II 50 200X050C440SP

Product ID: 7007253
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Supracap 50 depth filter capsules are designed for developing and optimizing a process during scale-up and scale-down studies. They can be used to quickly and accurately determine which series and grade of depth filter media will provide the best performance as well as the necessary filtration area required to meet process volume

27 Products In Family

SUPRAdisc SD 900 300X900C516VP product photo

SUPRAdisc SD 900 300X900C516VP

Product ID: 7005974
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD 300 300X300C216PP product photo

SUPRAdisc SD 300 300X300C216PP

Product ID: B15123
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak PW 5200 SW

Product ID: 5302800/S
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
Food Contact Compliant
Yes
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SUPRApak PW 5900 SW

Product ID: 5302742/S
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
Food Contact Compliant
Yes
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SUPRApak SW 7000 LW

Product ID: 5302741
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
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SUPRApak PW 5500 SW

Product ID: 5302807/S
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
Food Contact Compliant
Yes
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SUPRApak SW 5200 LW

Product ID: 5302797
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
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SUPRApak PW Series L Size, 16", PW 5500 Media, 8 m² Filter Area

Product ID: 5302807
Unit of Measure
1/EA
Min Order Qty
1
Flat Gasket Seal
Polypropylene
Food Contact Compliant
Yes
Hot Water Sanitization (Imperial)
185 °F
Steam Sterilization
125 °C
Steam Sterilization (Imperial)
258 °F
Series
PW-Series
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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