Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Air, Gas, and Vent Filtration

SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA1PFRW1

Product ID: KA1PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1V002PV1S
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
380 cm²
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Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA2V002PV2G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA2V002PV2S
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
820 cm²
See All Attributes

This product is currently not available. Please contact us for more information.

CRTG CFP04NGFFU product photo

CRTG CFP04NGFFU

Product ID: CFP04NGFFU
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
CRTG CHP10NGFFK product photo

CRTG CHP10NGFFK

Product ID: CHP10NGFFK
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
CRTG CFF92SEDDL product photo

CRTG CFF92SEDDL

Product ID: CFF92SEDDL
Unit of Measure
1/EA
Min Order Qty
1
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches

Product ID: CLR10195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: CLR102925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches

Product ID: CLR1010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: CLR1030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
10 micron
75 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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