Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Use

Lube and Hydraulic Oil Filtration

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
PCM500WUC MONITOR CLEANLINESS product photo

PCM500WUC MONITOR CLEANLINESS

Product ID: PCM500WUC
Unit of Measure
1/EA
Min Order Qty
1

Coralon Glass Fiber 12µm Nitrile Seal 30in 76.2cm length (REPLACED BY HC2286FRS30H50YT)

Product ID: HC2286FCS30H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

ELEMENT

Product ID: ACA530F25
Unit of Measure
1/EA
Min Order Qty
1
Family
-
RC778NZ086Z INDICATOR product photo

RC778NZ086Z INDICATOR

Product ID: RC778NZ086Z
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 5m Cable product photo

WS18 - 1/2" NPT 100mm Probe 5m Cable

Product ID: WS18DSB0805
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 100mm Probe 2m Cable product photo

WS18 - 1/2" BSP 100mm Probe 2m Cable

Product ID: WS18DSC08
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 10m Cable product photo

WS18 - 1/2" NPT 100mm Probe 10m Cable

Product ID: WS18DSB0810
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 2m Cable product photo

WS18 - 1/2" NPT 100mm Probe 2m Cable

Product ID: WS18DSB08
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 200mm Probe 2m Cable product photo

WS18 - 1/2" NPT 200mm Probe 2m Cable

Product ID: WS18DSB08L
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 100mm Probe 5m Cable product photo

WS18 - 1/2" BSP 100mm Probe 5m Cable

Product ID: WS18DSC0805
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" BSP 200mm Probe 5m Cable product photo

WS18 - 1/2" BSP 200mm Probe 5m Cable

Product ID: WS18DSC08L05
Unit of Measure
1/EA
Min Order Qty
1
2,873 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English