Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Lube and Hydraulic Oil Filtration

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: HC9600FRN16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
PCM500WUC MONITOR CLEANLINESS product photo

PCM500WUC MONITOR CLEANLINESS

Product ID: PCM500WUC
Unit of Measure
1/EA
Min Order Qty
1
RC778NZ086Z INDICATOR product photo

RC778NZ086Z INDICATOR

Product ID: RC778NZ086Z
Unit of Measure
1/EA
Min Order Qty
1

Coralon Glass Fiber 12µm Nitrile Seal 30in 76.2cm length (REPLACED BY HC2286FRS30H50YT)

Product ID: HC2286FCS30H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

ELEMENT

Product ID: ACA530F25
Unit of Measure
1/EA
Min Order Qty
1
Family
-

Ultipor, 1200psi Duplex Hsg, 1.25in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ8670F20SB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor, 1200psi Non-bypass Duplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ8671C20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor, 1200psi Non-bypass Duplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ8671C20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor, 1200psi Non-bypass Duplex Hsg, 1.25in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ8671F20UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor, 1200psi Non-bypass Duplex Hsg, 1.25in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ8671F20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
See All Attributes

This product is currently not available. Please contact us for more information.

2,873 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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