Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

8 in

Product Use

Lube and Hydraulic Oil Filtration

Ultipor, 150psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HH2124A24KNSATYS34
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
150 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 1200psi Duplex Hsg, 1.25in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH8670C20SB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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This product is currently not available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH9681C20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 8in Length, Nitrile Seals

Product ID: HH9681S20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.5in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH9681C24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Flange Ports, 8in Length, Nitrile Seals

Product ID: HH9681G20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Manifold Mount, 8in Length, Nitrile Seals

Product ID: HH9801K16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 1in SAE Ports, 8in Length, Nitrile Seals

Product ID: HHT200A161CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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HHT200A161CSSBG Assembly Filter In-Tank

Product ID: HHT200A161CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 1in BSP Ports, 8in Length, Nitrile Seals

Product ID: HHT200C161CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 1in BSP Ports, 8in Length, Nitrile Seals

Product ID: HHT200C161CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in JIS Ports, 8in Length, EPDM Seals

Product ID: HJ9021A12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
JIS B0203 tapered pipe thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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145 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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