Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Iron|Steel

Product Use

Lube and Hydraulic Oil Filtration

UH210C2013ZG ASSY HOUSING

Product ID: UH210C2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210E1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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UH210C2008ZG ASSY HOUSING

Product ID: UH210C2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.25in BSP Ports, 20in Length, Fluorocarbon Seals

Product ID: UH210C2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.25in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH210G2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210G2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UH210G2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

UR310F3240ZG ASSY HOUSING

Product ID: UR310F3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
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Athalon, 600psi Non-bypass Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310F4040ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2.5 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 2.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UR310F4013ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UR318A2413ZG01
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 13in Length, Nitrile Seals

Product ID: HH4741G24TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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362 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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