Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Use

Pre-Filtration

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches

Product ID: CLR30195
Unit of Measure
24/EA
Min Order Qty
24
Micron
30 micron
Length
49.5 cm / 19.5 in
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches

Product ID: CLR3039
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Length
102 cm / 40 in
CLR 30-10 product photo

30um, 10", DOE

Product ID: CLR3010
Unit of Measure
36/EA
Min Order Qty
36
Micron
30 micron
Length
25.4 cm / 10 in
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Micron
20 micron
Length
25.1 cm / 9.875 in
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches

Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Length
76.2 cm / 30 in
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches

Product ID: CLR30975
Unit of Measure
36/EA
Min Order Qty
36
Micron
30 micron
Length
24.8 cm / 9.75 in
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches

Product ID: CLR3040
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
Length
102 cm / 40 in
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: PFT210UFM3420
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 Inches, EPDM

Product ID: PFT2010UEM3841
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT1210UEM3643
Unit of Measure
1/EA
Min Order Qty
1
Micron
1.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer

Product ID: PFT1210UVM3929
Unit of Measure
1/EA
Min Order Qty
1
Micron
1.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches

Product ID: PFT130USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 µm
894 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English