Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

HDC® II membrane 47 mm diameter discs, 20 µm removal rating, 17 cm² EFA, pack of 25

Product ID: FTKJ200
Unit of Measure
1/EA
Min Order Qty
1
Format
47 mm disc
Removal Rating
20 µm
Effective Filtration Area (Metric)
17 cm²
Membrane Material
Polypropylene
Membrane Brand
HDC II
Industry-Specific Certification
Pharmaceutical Grade
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CLR 5-30-DOEE product photo

CLR 5-30-DOEE

Product ID: CLR530DOEE
Unit of Measure
12/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT510UM20E
Unit of Measure
30/EA
Min Order Qty
60
Micron
5 micron

Discontinued

This part is no longer available. Please contact us for more information.

O-RING SEAL FOR PDC12 HOUSING (SILICONE)

Product ID: PDC80744S
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Top Centerpost Gasket

Product ID: PDC80102P
Unit of Measure
1/EA
Min Order Qty
1

KIT PDC80020S

Product ID: PDC80020S
Unit of Measure
1/EA
Min Order Qty
1

O-RING FEP 18.64 I/D X 3.53

Product ID: PDC81036P
Unit of Measure
1/EA
Min Order Qty
1

KIT PDC20142S

Product ID: PDC20142S
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II Filter Cartridge, PFT02520UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02520UEW480

Product ID: PFT02520UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches

Product ID: PFT02530UGFMG7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
PFT 0.25-30US-M3W 480 product photo

PFT02530USM3W480

Product ID: PFT02530USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, silicone, DOE internal 120 O-rings

Product ID: PFT04510USM5
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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921 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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