Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J060P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
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HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J012P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.2 µm
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HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J045P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
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HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J100P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
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This product is currently not available. Please contact us for more information.

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA2J006P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.6 µm
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches

Product ID: CLR510
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
5 micron
Claris, Polypropylene, 5 micron, 29.5 inch product photo

Claris, Polypropylene, 5 micron, 29.5 inch

Product ID: CLR5295
Unit of Measure
12/EA
Min Order Qty
12
Length
74.9 cm / 29.5 in
Micron
5 micron
CLR 5-30-DOEE product photo

CLR 5-30-DOEE

Product ID: CLR530DOEE
Unit of Measure
12/EA
Min Order Qty
12
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches

Product ID: CLR52925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: CLR539
Unit of Measure
12/EA
Min Order Qty
12
Length
99.1 cm / 39 in
Micron
5 micron

This product is currently not available. Please contact us for more information.

Claris® Filter Cartridge, CLR530W480

Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches

Product ID: CLR550
Unit of Measure
20/EA
Min Order Qty
20
Length
127 cm / 50 in
Micron
5 micron
921 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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