Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Pre-Filtration

HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J100P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
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This product is currently not available. Please contact us for more information.

HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J045P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
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HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J012P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.2 µm
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HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J060P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
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HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA2J006P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.6 µm
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Filtro 1" Profile II 3µm product photo

Filtro 1" Profile II 3µm

Product ID: AB01Y03018J
Unit of Measure
3/EA
Min Order Qty
3
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FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR2WH4

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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Fluorodyne® II Filter Cartridges, AB1FSD7WH4

Product ID: AB1FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric m²)
0.55 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Fuente II Filter Cartridge, AB1FFN7WH4

Product ID: AB1FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PES, with built in pre-filtration
Effective Filtration Area (Metric m²)
1.04 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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HDC® II membrane 47 mm diameter discs, 20 µm removal rating, 17 cm² EFA, pack of 25

Product ID: FTKJ200
Unit of Measure
1/EA
Min Order Qty
1
Format
47 mm disc
Removal Rating
20 µm
Effective Filtration Area (Metric)
17 cm²
Membrane Material
Polypropylene
Membrane Brand
HDC II
Industry-Specific Certification
Pharmaceutical Grade
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches

Product ID: CLR20975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
20 micron
921 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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