Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

30 in

Product Use

Pre-Filtration

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches

Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches

Product ID: CLR330
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
3 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches

Product ID: CLR5030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
50 micron

Claris® Filter Cartridge, CLR530W480

Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches

Product ID: CLR530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches

Product ID: CLR7530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
75 micron
PFT 0.25-30US-M3W 480 product photo

PFT02530USM3W480

Product ID: PFT02530USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT02530UESIW480

Product ID: PFT02530UESIW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Ethylene Propylene Rubber, DOE – with open end caps/gasket product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Ethylene Propylene Rubber, DOE – with open end caps/gasket

Product ID: PFT02530UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02530USM7W480

Product ID: PFT02530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT04530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT04530UESIW480

Product ID: PFT04530UESIW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.45-30UEW 480 product photo

PFT 0.45-30UEW 480

Product ID: PFT04530UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
32 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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