Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

NA

Product Use

Pre-Filtration

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Micron
20 micron
Length
25.1 cm / 9.875 in
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches

Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Length
76.2 cm / 30 in
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches

Product ID: CLR20975
Unit of Measure
36/EA
Min Order Qty
36
Micron
20 micron
Length
24.8 cm / 9.75 in
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: CLR539
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Length
99.1 cm / 39 in

This product is currently not available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches

Product ID: CLR75195
Unit of Measure
24/EA
Min Order Qty
24
Micron
75 micron
Length
49.5 cm / 19.5 in
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA3030UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches

Product ID: NXA4010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 9.75 inches

Product ID: NXA40975U
Unit of Measure
30/EA
Min Order Qty
30
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA510U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT1530UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
15 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT520UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
134 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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