Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Removal Rating

3 µm

Seal Material

Fluorocarbon

Beta Rating

BETA 1000

Filter Media

Glass Fiber

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 18in 45.72cm

Product ID: HC2618FAZ18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
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Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 36in 91.44cm (REPLACED BY HC0101FRZ36Z)

Product ID: HC0101FKZ36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
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Ultipor III Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9020FRZ8ZY923)

Product ID: HC9020FKZ8ZY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 41in 104.14cm (REPLACED BY HCY09003FRZ41Z)

Product ID: HCY09003FKZ41Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCY090
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

HC0101FCZ18Z ELEMENT

Product ID: HC0101FCZ18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
2.5 Micron, Beta 1000
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9600FRZ8ZY923)

Product ID: HC9600FKZ8ZY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

Red1000 Anti-Static Glass Fiber 3 micron (Beta 1000) Fluorocarbon 18in 45.72cm length (REPLACED BY HC2618FRZ18Z)

Product ID: HC2618FMZ18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC8300FRZ8Z)

Product ID: HC8300FAZ8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8304FRZ16Z)

Product ID: HC8304FAZ16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8314FRZ16Z)

Product ID: HC8314FAZ16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8314
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9020FRZ8Z)

Product ID: HC9020FAZ8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 3 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9020FRZ4Z)

Product ID: HC9020FKZ4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

12 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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