Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Cartridge Length (Imperial)

10 in

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches

Product ID: CLR1010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
10 micron

Claris® Filter Cartridge, CLR110W480

Product ID: CLR110W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: CLR110
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
1 micron

Profile® Star Filter Cartridge, AB1A0507WH4

Product ID: AB1A0507WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Fluorodyne® II Filter Cartridges, AB1FSD7WH4

Product ID: AB1FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric m²)
0.55 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD1010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Profile® UP Filter Cartridges, 10 in, 40 µm, Ethylene Propylene Rubber

Product ID: PUY1UY400WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F010TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F005TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F050TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium product photo

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F100TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
See All Attributes
48 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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