Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

20 in

Filter Media

Glass Fiber

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches

Product ID: F010AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches

Product ID: F020AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, GlassFiber, Length 20 Inches

Product ID: F050AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, GlassFiber, Length 20 Inches

Product ID: F100AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
4 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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