Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

20 in

Gasket / O-Ring Material

Silicone Elastomer

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer

Product ID: PFT02520USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Silicone Elastomer, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Silicone Elastomer, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFTQ520USM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Series Filter Cartridges, Polypropylene, 3 µm, 20 in., Silicone Elastomer, M7

Product ID: NXT320UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes

Nexis® T Series Filter Cartridges, Polypropylene, 5 µm, 20 in., Silicone Elastomer, M7

Product ID: NXT520UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
Poly-Fine® II Filter Cartridge, PFT1020USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT1020USM7W480

Product ID: PFT1020USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II Filter Cartridge, PFT520USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT520USM7W480

Product ID: PFT520USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
6 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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