Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

4 in

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 4 inches

Product ID: NXA054UM3S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN0454AN317
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

This product is currently not available. Please contact us for more information.

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches, Nitrile

Product ID: DFN0454AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 4 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN104AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

This product is currently not available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches

Product ID: DFNT0454UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HH9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.75in SAE Ports, 4in Length, Nitrile Seals

Product ID: HHT200A121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C121CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

HHT200A161CSRBG Assembly Filter In-Tank

Product ID: HHT200A161CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.5in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C081CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.5 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Versalon, 150psi Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 4in Length, EPDM Seals

Product ID: HJ9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes
99 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English