Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

4 in

Family

Athalon

Athalon, 6000psi Simplex Hsg, 1.25in Manifold Mount, 4in Length, Fluorocarbon Seals

Product ID: UH210K2004ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.25in Manifold Mount, 4in Length, Fluorocarbon Seals

Product ID: UH210S2004ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in Manifold Mount, 4in Length, Fluorocarbon Seals

Product ID: UH210S2004ZG3H
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in Manifold Mount, 4in Length, Fluorocarbon Seals

Product ID: UH210S2004ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UT210C1604Z8
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UT210C1604ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UT210C1604ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210C1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in SAE Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210A1604ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in Flange Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210E1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in Flange Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210G1604ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

UH210A1604ZG ASSY HOUSING

Product ID: UH210A1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes
19 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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