Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

40 in

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C001AW40S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: C001AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C003AW40S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
C003AW40A-1PK product photo

C003AW40A-1PK

Product ID: C003AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 304 stainless steel, with Core Cover

Product ID: C005AW40AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Bleached cotton, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Bleached cotton, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: C005AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C005AW40S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene, Bulk packaging

Product ID: C010AW40U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C010AW40S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, 316 stainless steel

Product ID: C010AW40SNM3S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, 304 stainless steel

Product ID: C020AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: C050AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
515 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English