Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

40 in

Seal Material

Fluorocarbon

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR619CD4040ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR699CF4040ZG9 ASSEMBLY HOUSING

Product ID: UR699CF4040ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR699CD4040ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310G3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in BSP Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310C3240ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Non-bypass Simplex Hsg, 2in BSP Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310C3240ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310D4040ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in BSP Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310C3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310D4040ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310F3240ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310F4040ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR310F4040ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
600 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes
83 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English