Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

60 in

Vector™ High Flow Large Format Filters, Removal Rating 25 µm, Polyester, Length 60 inches

Product ID: HFV660PE025AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
25 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP010PH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 60 inches, EPDM O-ring

Product ID: HFV660PP010PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8 product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8

Product ID: PFT04560USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 60 Inches, 10% glass fiber reinforced polypropylene End caps

Product ID: PFTM1060UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Nexis® High Flow Large Format Filters, Removal Rating 15 µm, Length 60 inches, Fluorocarbon O-ring

Product ID: HFNX660Y150H
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
15 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
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Nexis® High Flow Large Format Filters, Removal Rating 15 µm, Length 60 inches

Product ID: HFNX660Y150J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
15 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
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Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 60 inches, Ethylene propylene O-ring

Product ID: HFNX660Y400J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
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Nexis® High Flow Large Format Filters, Removal Rating 10 µm, Length 60 inches, Ethylene propylene O-ring

Product ID: HFNX660Y100J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 10 µm, Length 60 inches, Fluorocarbon O-ring

Product ID: HFNX660Y100H
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
See All Attributes

Nexis® High Flow Large Format Filters, Length 60 inches, Ethylene propylene O-ring

Product ID: HFNX660Y200J191
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Vector™ High Flow Large Format Filters, Removal Rating 50 µm, Polyester, Length 60 inches

Product ID: HFV660PE050AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
50 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
88 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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