Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Metric)

508 mm

Poly-Fine® ARD, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 Inches, EPDM

Product ID: ARD0520UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches

Product ID: ARD1020UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
See All Attributes

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal

Product ID: ARD120UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
See All Attributes

Poly-Fine® ARD, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal

Product ID: ARD2020UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
See All Attributes

Poly-Fine® ARD, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches

Product ID: ARD320UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 20 inches

Product ID: HFNX620Y400H13
Unit of Measure
12/EA
Min Order Qty
12
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 75 µm, Length 20 inches

Product ID: HFNX620Y750H13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inch/mm
Filter Grade
75 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 10 µm, Length 20 inches

Product ID: HFNX620Y100JU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inch/mm
Filter Grade
10 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 20 inches

Product ID: HFV620PP010PH13
Unit of Measure
6/EA
Min Order Qty
6
Cartridge Length
20/508 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene

Product ID: C001AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel, with Core Cover

Product ID: C001AW20AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, 316 stainless steel, with Core Cover

Product ID: C005AW20SC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
333 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English