Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Effective Filtration Area

750 cm²

Sterilization Option(s)

Suitable for Gamma Irradiation, Suitable for Autoclave

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA2EKVP1G
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
750 cm²
Sterilization Option(s)
Suitable for Gamma Irradiation, Suitable for Autoclave
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
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Supor® EKV Membrane in Kleenpak™ Capsules

Validated sterilizing grade membranes for the most cost effective filtration of a wide range of liquids such as buffers, tissue culture media, and others

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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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