Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Athalon

UR619CA3240ZA9 ASSEMBLY HOUSING

Product ID: UR619CA3240ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
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UH310A2013ZG ASSY HOUSING

Product ID: UH310A2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310A2420ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310C2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in BSP Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310C2420ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310E2420ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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UR310A2413ZG ASSY HOUSING

Product ID: UR310A2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR310A2408ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR629CF4840ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Athalon Glass Fiber 25 micron (Beta 2000) Ethylene Propylene 3in 7.62cm

Product ID: UE209AT03J
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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ELEMENT ULTIPLEAT SRT

Product ID: UE209AN07Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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625 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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