Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Ultipor

Ultipor, 1200psi Duplex Hsg, 1.25in BSP Ports, 16in Length, Nitrile Seals

Product ID: HH8670C20UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 8in Length, Nitrile Seals

Product ID: HH9681S20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6500psi Non-bypass Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4711G24TW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

HZ4711C24TW9YE47 ASSEMBLY HOUSING

Product ID: HZ4711C24TW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4751E24UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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ASSEMBLY HOUSING HZ9021C12RW1

Product ID: HZ9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in BSP Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ9681C20UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor Glass Fiber 7µm Fluorocarbon Seal 14in 35.56cm length

Product ID: HC2295FKN14Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2295
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor, 200psi Simplex Hsg, 2in BSP Ports, Nitrile Seals

Product ID: HH7502C32B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
200 psi
Port Size
2 in
Number of Cartridges
2
Material of Construction
Cast Iron
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64/05002119/11 SEAL KIT

Product ID: 64/05002119/11
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Family
Ultipor

Ultipor Glass Fiber 5µm Nitrile Seal 8in 20.32cm length

Product ID: F1364531
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
5 micron, Beta 1000
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Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC0101FKN18HY533
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
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171 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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