Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

1 µm

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge

Product ID: PEV11UEPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Plastic self-adjusting flange

Product ID: PEV12UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange

Product ID: PEV12UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge

Product ID: PEV12UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV12UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge, No flange

Product ID: PEV11UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange, FSI CBFP Series vessels

Product ID: PEV12UNPFCB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, Fluorocarbon

Product ID: RPF009UY640S0010V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, EPDM

Product ID: RPF009UY640S0010E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, Silicone

Product ID: RPF009UY640S0010S
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches

Product ID: RPF009UY640S0010N
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches

Product ID: RPF009UY660S0010S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
50 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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