Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

20 µm

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 20 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2020UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: XLDM2060UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
60 in
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 40 Inches

Product ID: XLDM2040UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
20 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
40 in
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Marksman™, Large Format Filters, Filter Grade 20 µm, Borosilicate micro fiberglass with acrylic binder

Product ID: DFNM20125TVM5
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
20 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Polypropylene, Length 20 inches

Product ID: E602Y200
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
20 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Length 20 inches

Product ID: E602FPS200
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Nylon, Length 40 inches

Product ID: E604N200
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
20 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Polypropylene, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604Y200
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
20 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Marksman™, Large Format Filters, Removal Rating 20 μm, Polypropylene, Length Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: NXAM202UEPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 60 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2060UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 40 Inches, Nitrile O-ring

Product ID: PFTM2040UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Profile® Coreless Large Format Filters, Removal Rating 20 μm, Length 40 inches

Product ID: E604FPS200
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
20 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
21 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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