Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Filter Grade

40 µm

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM4040UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 40 inches, Ethylene propylene O-ring

Product ID: HFNX640Y400J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
See All Attributes

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Nylon, Length 20 inches

Product ID: E602N400
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Media Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Nylon, Length 40 inches

Product ID: E604N400NPL
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Media Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 40 inches, Nitrile O-ring

Product ID: HFNX640Y400H13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
See All Attributes

Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 60 inches, Ethylene propylene O-ring

Product ID: HFNX660Y400J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 40 μm, Polypropylene, Length Size 1 bag, No flange

Product ID: NXAM401UNF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 bag
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 40 μm, Length Size 1 bag

Product ID: NXAMS401UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 bag
Filter Grade
40 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 60 Inches

Product ID: PFTM4060UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 20 Inches, Ethylene Propylene U-cup

Product ID: PFTM4020UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 40 μm, Length 40 inches, Fluorocarbon

Product ID: RPF009UY640S0400V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 40 μm, Length 40 inches, Nitrile

Product ID: RPF009UY640S0400N
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
30 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English