Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Filter Grade

5 µm

Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 1 cartridge, EPDM

Product ID: POV51UEPFF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge

Product ID: POV52UEPFF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge, Fluorocarbon elastomer

Product ID: POV52UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 40 inches, Silicone

Product ID: RPF009UY640S0050S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Marksman™, Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 bag, No flange

Product ID: NXAM52UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polyester, Length 9 inches

Product ID: HFV609PE005AH13
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
09 / 228.6 inch/mm
Filter Grade
5 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polyester, Length 9 inches, Fluoropolymer elastomer O-ring

Product ID: HFV609PE005AH
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
09 / 228.6 inch/mm
Filter Grade
5 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polypropylene, Length 40 inches, Fluoropolymer elastomer O-ring

Product ID: HFV640PP005AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polyester, Length 40 inches

Product ID: HFV640PE005PH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP005PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polypropylene, Length 40 inches

Product ID: HFV640PP005PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 5 µm, Polypropylene, Size 2 Bag, Nitrile

Product ID: PFTM52UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 Bag
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
48 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English