Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

5 µm

Marksman™ Retrofit, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 38 Inches, Fluorocarbon elastomer

Product ID: PFTM5740V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
38/965 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
150 mm
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Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 1 cartridge, EPDM

Product ID: POV51UEPFF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge

Product ID: POV52UEPFF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge, Fluorocarbon elastomer

Product ID: POV52UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 40 inches, Silicone

Product ID: RPF009UY640S0050S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 40 inches, EPDM

Product ID: RPF009UY640S0050E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 40 inches, Fluorocarbon

Product ID: RPF009UY640S0050V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 60 inches, Silicone

Product ID: RPF009UY660S0050S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 60 inches, Nitrile

Product ID: RPF009UY660S0050N
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 60 inches, EPDM

Product ID: RPF009UY660S0050E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 5 μm, Length 60 inches

Product ID: RPF009UY660S0050V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Marksman™, Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 bag, EPDM

Product ID: NXAM52UEPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
48 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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