Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

50 µm

Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge, Fluorocarbon elastomer

Product ID: PEV502UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge, No flange

Product ID: PEV502UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 1 cartridge

Product ID: PEV501UVPFCB
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge

Product ID: PEV502UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV502UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 50 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange, FSI Polylock FSPN Series vessels

Product ID: PEV502UNPFF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
50 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector, Polyester Media Material with 50 µm (micron) Filter Grade

Product ID: HFV640PE050AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
50 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, polypropylene Media Material with 50 µm (micron) Filter Grade

Product ID: HFV640PP050PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
50 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 50 µm, Polyester, Length 60 inches

Product ID: HFV660PE050AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
50 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 50 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP050PH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
50 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 50 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring

Product ID: HFV660PP050PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
50 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Profile® Coreless Large Format Filters, Removal Rating 50 μm, Length 20 inches

Product ID: E602FPS500
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inch/mm
Filter Grade
50 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
19 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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