Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

70 µm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 70 μm, Length 60 inches, EPDM

Product ID: RPF009UY660S0700E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
70 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 70 μm, Length 60 inches, Fluorocarbon

Product ID: RPF009UY660S0700V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
70 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 1 bag, EPDM

Product ID: NXAM701UEPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 2 bag, EPDM, Plastic self-adjusting flange, FSI BFNP Series vessels GAF

Product ID: NXAM702UEPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 1 bag

Product ID: NXAM701UVPFB
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 1 bag, No flange

Product ID: NXAM701UNF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: NXAM702UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 2 bag, Nitrile

Product ID: NXAM702UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Removal Rating 70 μm, Length Size 2 bag, No flange

Product ID: NXAMS702UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Removal Rating 70 μm, Polypropylene, Length Size 2 bag

Product ID: NXAM702UNF185
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 70 μm, Length 40 inches, EPDM

Product ID: RPF009UY640S0700E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
70 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 70 μm, Length 40 inches

Product ID: RPF009UY640S0700S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
70 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
23 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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