Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

NA

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT1020UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT10195UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches

Product ID: NXT10195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXT1020U42
Unit of Measure
10/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: NXT102925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT1030U1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT1030UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene

Product ID: NXT10295U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
End Configuration
BLANK - DOE industrial (no end caps)
Cartridge Type
NXT
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 39.5 inches

Product ID: NXT10395UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39.5 in
Cartridge Length (Metric)
1003 mm
Cartridge Length (Metric)
100.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 39 inches

Product ID: NXT1039U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
NA
See All Attributes

This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT1040U664
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE Santoprene gasket seal

Product ID: NXT1040UH21
Unit of Measure
20/EA
Min Order Qty
20
Micron
10 micron
427 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English