Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

Silicone Elastomer

Poly-Fine® II Filter Cartridge, PFT02510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM7W480

Product ID: PFT02510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
PFT 0.25-30US-M3W 480 product photo

PFT02530USM3W480

Product ID: PFT02530USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02530USM7W480

Product ID: PFT02530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04530USM7W480

Product ID: PFT04530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8 product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8

Product ID: PFT04560USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.8-10US-M3W 480 product photo

PFT0810USM3W480

Product ID: PFT0810USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II Filter Cartridge, PFT0810USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0810USM7W480

Product ID: PFT0810USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
PFT 0.8-40US-M7W 480 product photo

PFT 0.8-40US-M7W 480

Product ID: PFT0840USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
PFT 10-10US-M7W 480 product photo

PFT 10-10US-M7W 480

Product ID: PFT1010USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II Filter Cartridge, PFT1020USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT1020USM7W480

Product ID: PFT1020USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
PFT 30-30US-M8W 480 product photo

PFT 30-30US-M8W 480

Product ID: PFT3030USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
67 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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