Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Removal Rating

0.2 µm

Inlet Configuration

1½ in (38 mm) sanitary flange

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Product ID: KA2DFLP16S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyvinylidene fluoride (PVDF)
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
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Posidyne® - Kleenpak™ Capsules

Kleenpak™ Capsules with Posidyne® Membrane meet cleanliness requirement per USP Particulates in Injectable. It features positive Zeta potential for enhanced efficiency in aqueous solutions. Capsules contain a double-layer sterilizing membrane for high reliability and high-quality product. Filters are self-contained and designed for small sterile filtration systems throughout a range of acidic to basic solutions.

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Fluorodyne® II DFL Membrane in Kleenpak™ Capsules

Fluorodyne® II DFL Membrane in Kleenpak™ Capsules provides many benefits to their users such as high protein transmission and rapid preservative recovery. DFL is ideal for sterilizing filtration of biopharmaceutical grade fluids. Solutions with active ingredients are carefully filtered throughout DFL's compact design. Each product includes a Certificate of Test for bacterial retention and fabrication integrity.

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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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