Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Membrane Brand

Fluorodyne II DFL

Membrane Material

Polyvinylidene fluoride (PVDF)

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, suitable for gamma irradiation

Product ID: KA1DFLP16G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Product ID: KA1DFLP16S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA1DFLP6G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA1DFLP2S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA1DFLP2G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA1DFLP6S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1DFLP1S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Product ID: KA2DFLP16S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
800 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA1DFLP1G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, suitable for gamma irradiation

Product ID: KA2DFLP16G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
800 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA2DFLP1G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
800 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA2DFLP6S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
800 cm²
See All Attributes
22 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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