Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Nominal Length (Imperial)

39 in

Nominal OD (Imperial)

3.8 in

Ultipor III Wire Mesh 25 micron Nitrile 39in 99.06cm length

Product ID: HC8904EOJ39HX378
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8904
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
39 in
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Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 39in 99.06cm

Product ID: HC9400FTP39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC9901FHP39Z)

Product ID: HC9901FDP39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9901
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor III Glass Fiber 25 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC9901FHT39Z)

Product ID: HC9901FDT39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9901
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
15 µm
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Ultipor SRT Glass Fiber 7 micron (Beta 1000) Nitrile 39in 99.06cm (REPLACED BY HC8900FRN39HY550N1)

Product ID: HC8900FAN39HY550N1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC8900FRN39Z)

Product ID: HC8900FKN39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC8900FRS39Z)

Product ID: HC8900FKS39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 25 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC8900FRT39Z)

Product ID: HC8900FKT39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 22 micron (Beta 1000) Nitrile 39in 99.06cm length

Product ID: HC8904FMT39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 39in 99.06cm length

Product ID: HC8904FMS39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC9404FRN39ZYQ63)

Product ID: HC9404FKN39ZYQ63
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9404
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 39in 99.06cm length

Product ID: HC9404FMN39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9404
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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