Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Availability

In Stock

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

O-RING BUNA OR-908 FTM

Product ID: F1124507
Unit of Measure
1/EA
Min Order Qty
1

RING SEAL 8670

Product ID: F1319235
Unit of Measure
1/EA
Min Order Qty
1

O-RING BUNA OR-014 FTM

Product ID: F1124516
Unit of Measure
1/EA
Min Order Qty
1

O-RING BUNA OR-242

Product ID: F1309236
Unit of Measure
1/EA
Min Order Qty
1

O-RING VITN ORH-014 FTM

Product ID: F1126551
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 16 Inches

Product ID: HC8304FRN16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA130U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron

MCC1401E100H13

Product ID: MCC1401E100H13
Unit of Measure
1/EA
Min Order Qty
1

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LG02H13
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
0.83 bar
Change out pressure drop (psid)
12 psid
Maximum differential pressure rating (bar)
2.75 bar
Maximum differential pressure rating (psid)
40 psid
See All Attributes

TUBE GUIDE 316L 2 HIGH

Product ID: T10574040
Unit of Measure
1/EA
Min Order Qty
1

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 16in 40.64cm

Product ID: HC8900FTN16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes
1,602 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English