Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Availability

In Stock

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

SUPRAdisc SD II 300 200X300C232SPW

Product ID: 7007876
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
See All Attributes

Duo-Fine®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches

Product ID: DFPT1020ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipleat SRT Glass Fiber 7 micron (Beta 1000) Nitrile 20in 50.8cm

Product ID: F1389414
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
UE619
Family
Ultipleat SRT
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 8 Inches

Product ID: HC6200FRS8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
12 µm
Membrane Material
Glass Fiber

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 8 Inches

Product ID: HC7414FRN8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC7414
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9020FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber

MCY4463J200H13

Product ID: MCY4463J200H13
Unit of Measure
12/EA
Min Order Qty
12

ORH13-906

Product ID: P1174736
Unit of Measure
1/EA
Min Order Qty
1

PF 2-30AE

Product ID: PF230AE
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II Filter Cartridge, PFT0810UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0810UEW480

Product ID: PFT0810UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT3010UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :