Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
Unit of Measure
4/EA
Min Order Qty
4
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 60 Inches, Ethylene Propylene O-ring Material

Product ID: HFU660UY100J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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O-RING BUNA-N

Product ID: T10540120
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, 304 stainless steel

Product ID: C020AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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ELEMENT UE210AP08Z

Product ID: UE210AP08Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Athalon Glass Fiber 22 micron (Beta 2000) Fluorocarbon 8in 20.32cm

Product ID: UE210AT08Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 2000
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Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
Min Order Qty
1

UE210AN08Z ELEMENT BRANDED KMT

Product ID: 1000671
Unit of Measure
1/EA
Min Order Qty
1
Family
-

O-RING FLCB ORH136

Product ID: 1129173
Unit of Measure
1/EA
Min Order Qty
1

O-RING FLCB ORH245 K

Product ID: 1129258
Unit of Measure
1/EA
Min Order Qty
1

HLP6/10/22 TOWER FLOAT ASSY

Product ID: 100048501
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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