Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel

Product ID: G010AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G020AW30SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 304 stainless steel

Product ID: G030AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G050AW30SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes

WSFZ Standard Accessory Kit

Product ID: GFB0157
Unit of Measure
1/EA
Min Order Qty
1

GP 1-4U-X3S 246

Product ID: GP14UX3S246
Unit of Measure
1/EA
Min Order Qty
1

GP 30-10U-X4N 246

Product ID: GP3010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

GP 10-20A-X4V 246

Product ID: GP1020AX4V246
Unit of Measure
1/EA
Min Order Qty
1

GP 3-30A-X4N 246

Product ID: GP330AX4N246
Unit of Measure
1/EA
Min Order Qty
1

GP 50-10U-X4N 246

Product ID: GP5010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

H4710SKH SEAL KIT

Product ID: H4710SKH
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® Filter Housing Seal Kit

Product ID: H9600SKZ
Unit of Measure
1/EA
Min Order Qty
1
1,607 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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