Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Nexis® High Flow Large Format Filters, Removal Rating 40 µm, Length 40 inches, Ethylene propylene O-ring

Product ID: HFNX640Y400J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
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Ultipleat® High Flow, Large Format Filters, Filter Grade 6 µm, Resinbondedglassfiber, Length 9 Inches

Product ID: HFU609GF060H13
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 9 Inches, Fluoroelastomer O-ring Material

Product ID: HFU609GF100H
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 29 µm, Resinbondedglassfiber, Length 9 Inches

Product ID: HFU609GF400H
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 6 µm, Glass Fiber Media with Aramid Support, Length 9 Inches

Product ID: HFU609UY060J
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 1 µm, PleatedPolypropylenePES, Length 20 Inches, Ethylene Propylene U-Cup

Product ID: HFU620CAS010JU
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 9 Inches, Fluoroelastomer O-ring Material

Product ID: HFU609UY045H
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 9 Inches, Fluoroelastomer O-ring Material

Product ID: HFU609UY100H
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 9 Inches

Product ID: HFU609UY100J
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Length 20 Inches

Product ID: HFU620G400ZH
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 1 µm, PleatedPolypropylenePES, Length 20 Inches, Polypropylene Support

Product ID: HFU620CAS010HU
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 20 Inches, Nitrile O-ring Material

Product ID: HFU620GF200H13
Unit of Measure
4/EA
Min Order Qty
4
1,629 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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