Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

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1P30A

Product ID: 1P30A
Unit of Measure
20/EA
Min Order Qty
20

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SUPRApak PW 7100 MW

Product ID: 5303072/M
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
11.2 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
Food Contact Compliant
Yes
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SUPRApak PW Series L Size, 16", PW 5500 Media, 8 m² Filter Area

Product ID: 5302807
Unit of Measure
1/EA
Min Order Qty
1
Flat Gasket Seal
Polypropylene
Food Contact Compliant
Yes
Hot Water Sanitization (Imperial)
185 °F
Steam Sterilization
125 °C
Steam Sterilization (Imperial)
258 °F
Series
PW-Series
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SUPRApak PW 5700 MW

Product ID: 5303071/M
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
11.2 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
Food Contact Compliant
Yes
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SUPRApak SW 5900 LW

Product ID: 5302871
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
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SUPRAdisc SD II 080 200X080C232SPW

Product ID: 7007865
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
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Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm

Product ID: 8FL20043-01
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: 8FL51010-01
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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A1449249

Product ID: A1449249
Unit of Measure
30/EA
Min Order Qty
30

A-9935 249

Product ID: A9935249
Unit of Measure
10/EA
Min Order Qty
10

A-1555 249

Product ID: A1555249
Unit of Measure
30/EA
Min Order Qty
30

SUPRAdisc SD II 300 200X300C232SPW

Product ID: 7007876
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
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1,564 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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