Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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HC9801FDN4H

Product ID: HC9801FDN4H
Unit of Measure
1/EA
Min Order Qty
1

ELEMENT "T"RANGE G200KD4Z

Product ID: HCG200FKD4Z
Unit of Measure
1/EA
Min Order Qty
1

ELEMENT "T"RANGE G200KT8Z

Product ID: HCG200FKT8Z
Unit of Measure
1/EA
Min Order Qty
1

HGD-U005AW50U-M8-N-R

Product ID: HGDU005AW50UM8NR
Unit of Measure
72/EA
Min Order Qty
72

HGEDF 1P30U-EU 400

Product ID: HGEDF1P30UEU400
Unit of Measure
10/EA
Min Order Qty
10

Poly-Fine® II Filter Cartridges, Removal Rating 1 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT010300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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QMPT 010-300UE

Product ID: QMPT010300UE
Unit of Measure
60/EA
Min Order Qty
60

Poly-Fine® II Filter Cartridges, Removal Rating 1 μm, Length 40 inches, Nitrile

Product ID: QMPT010400UNM220
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
Change Out Differential Pressure
2.4 bard
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Discontinued

This part is no longer available. Please contact us for more information.

QMPT 010-400UE-M3

Product ID: QMPT010400UEM3
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® II Filter Cartridges, Removal Rating 5 μm, Length 40 inches, Nitrile

Product ID: QMPT050400UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
Blank
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Poly-Fine® II Filter Cartridges, Removal Rating 10 μm, Length 30 inches

Product ID: QMPT100300UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
Blank
End Configuration
Blank - DOE with elastomer gasket seals and end caps
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4,138 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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