Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Featured product

false

Cartridge Length (Imperial)

60 in

PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8 product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8

Product ID: PFT04560USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 60 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 60 Inches

Product ID: PFT1060UN404
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 60 Inches, Nitrile O-ring, polypropylene Hardware

Product ID: PFTM1060UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 60 Inches, 10% glass fiber reinforced polypropylene End caps

Product ID: PFTM1060UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 60 Inches, 10% glass fiber reinforced polypropylene End caps

Product ID: PFTM160UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 60 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM160UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 60 Inches, Nitrile O-ring

Product ID: PFTM160UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 60 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2060UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM2060UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 3 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM360UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
3 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 60 Inches

Product ID: PFTM4060UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM4060UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes
88 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English