Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY045J
Unit of Measure
8/EA
Min Order Qty
8
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 20 Inches

Product ID: HFU620UY100J
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20.7/526 inches/mm
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640GF100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR7WH4

Product ID: AB05PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR2WH4

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR7WH4

Product ID: AB1PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB2PFR7WH4

Product ID: AB2PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric m²)
1.6 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
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FEATURED

Emflon® PFRW Filter Cartridges, AB3PFR7WH4

Product ID: AB3PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric m²)
2.4 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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FEATURED

Junior Filter Emflon PFR 0.2µm

Product ID: SBF1PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
410 cm²
Filter Cartridge Style
SBF-style junior
Cartridge Length (Imperial)
10 in
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY020J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY045H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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251 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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