Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

Filter Media

Polypropylene

NXA 20-19.75U-H21 product photo

Nexis, NXA, 20 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA201975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
NXA 20-20U-M3E product photo

Nexis, NXA, 20 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA2020UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron
NXA 20-4U-M3E product photo

Nexis, NXA, 20 μm, 10.2 cm (4 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA204UM3E
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
NXA 2-20U-M3E product photo

Nexis, NXA, 2 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA220UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
2 micron
NXA 30-19.75U-H21 product photo

Nexis, NXA, 30 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA301975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
NXA 30-30U-DOEE product photo

Nexis, NXA, 30 μm, 76.2 cm (30 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA3030UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
NXA 3-20U-M3E product photo

Nexis, NXA, 3 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA320UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
NXA 40-10U-M7S product photo

Nexis, NXA, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
NXA 50-20U product photo

Nexis, NXA, 50 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXA5020U
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
NXA 5-20U-M3E product photo

Nexis, NXA, 5 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA520UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
NXA 5-30U-M3E product photo

Nexis, NXA, 5 μm, 76.2 cm (30 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA530UM3E
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
NXA 70-10U-M7S product photo

Nexis, NXA, 70 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA7010UM7S
Unit of Measure
30/EA
Min Order Qty
30
Micron
70 micron
75 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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