Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

Featured product

false

Product Type

Filter Cartridges

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT200TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
200 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXT
See All Attributes

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

NXT 1-10U-M3E

Product ID: NXT110UM3E
Unit of Measure
30/EA
Min Order Qty
60

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT120TFUDOEE47
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
120 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXT
See All Attributes

NXT 1-20U-DOEE

Product ID: NXT120UDOEE
Unit of Measure
24/EA
Min Order Qty
24

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT150TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
150 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXT
See All Attributes

NXT 20-20U-M3E

Product ID: NXT2020UM3E
Unit of Measure
1/EA
Min Order Qty
1

NXT 20-9.875U-H21

Product ID: NXT209875UH21
Unit of Measure
1/EA
Min Order Qty
1

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT3030U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
NXT 30-20U-H21 product photo

NXT 30-20U-H21

Product ID: NXT3020UH21
Unit of Measure
20/EA
Min Order Qty
20
149 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English