Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

Product Use

Pre-Filtration

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXA0530UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
NXA 50-20U product photo

Nexis, NXA, 50 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXA5020U
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT0520UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches

Product ID: NXT15U
Unit of Measure
60/EA
Min Order Qty
60
Micron
1 micron
NXT 200-10U-M8F product photo

Nexis, NXT, 200 μm, 25.4 cm (10 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), FEP encapsulated fluorocarbon elastomer (O-rings)

Product ID: NXT20010UM8F
Unit of Measure
30/EA
Min Order Qty
30
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXT20020UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
200 micron
NXT 200-20U-H21 product photo

Nexis, NXT, 200 μm, 50.8 cm (20 in), DOE, Santoprene gasket seal

Product ID: NXT20020UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT2010UM18F
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
30/EA
Min Order Qty
30
Micron
3 micron
Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches

Product ID: CLR75195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
75 micron
295 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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